Process Chamber Lid

Backing Plate
Connect to Chamber Lid and seal with Chamber

Diffuser
Ensure that the gas used in the evaporation process is evenly sprayed into the chamber, and the high frequency electric field is directed into the chamber as an electrode

Process Chamber Body

Shadow Frame
Edge plasma is shielded to control the coating range

Susceptor
As the lower plate of the parallel capacitor, as the supporting part of the substrate

Ceramic
Ceramics are a kind of inorganic nonmetallic materials made from synthetic compounds by forming and sintering at high temperature.

Upper Electrode
The upper electrode is mainly used in the glass panel production process, mainly plays a role in dispersing gas molecules, so that the glass panel surface formed a small loop when the dry engraving engineering components.

Liner
Protective panels on the interior walls of the equipment chamber protect equipment from corrosive gases.

Lower Electrode
Used in flat panel display device, integrated circuit dry etching process, its adsorption fixed chip or glass substrate, and to the electrostatic chuck into the RF.

OLED

LCD



ICP UNIT

ICP UNIT(In Chamber Probe) Unit is a fixture for detecting the CELL Unit of the OLED raw board in a room filled with high purity nitrogen.



ARRAY UNIT

ARRAY UNIT –UNIT that checks for abnormalities by detecting the electrical signals on the TFT CELL and the returned electrical signals. The Pitch is very small and the impedance is constant. It is a product with high requirements for accuracy.



FULL CONTACT UNIT

FULL CONTACT UNIT (BLADE)

BLADE TYPE-A product that processes hundreds of grooves on Ceramic materials, inserts a blade pin as small as a blade between Slit, contacts cellPad and Pin1:1 with an assembled block, and performs lighting inspection through electrical signals.



FULL CONTACT UNIT

FULL CONTACT UNIT (BUMP FILM)

FILM TYPE –A metal pattern is formed on the polyimide film and inserted to contact the BUMP so that the panel pad is detected in 1:1 contact with the BUMP.



SHORTING BAR UNIT

SHORTING BAR UNIT (LSF)

Combining the advantages and disadvantages of SHORTING BAR TEST and FULL CONTACT TEST, UNIT uses SHORTING BAR signal and CONTACT mode uses FULL CONTACT.



SHORTING BAR UNIT

SHORTING BAR UNIT (2D&TR)

The easiest way to check is to connect PANEL PAD to R, G, B, VOM and other TEST pads of SHORTING BAR LINE through CONTACT. Inspection methods are limited and accuracy has decreased.